Fixed Pyrolyzer Unit GD-81D Series: PLU-80

This pyrolyzer unit can be used in combination with the GD-81D Series to detect gases like NF₃ and TEOS. Designed to be the same size as the previous PLU-70 unit, eliminating any concerns about installation space.

Properties:

Sampling method: Suction type / Single type
Principle of detection: Potentiostatic Electrolysis Method, Pyrolysis-Particle Detection Method
Detection range: Depends on the target gas (using the GD-81D sensor)
Explosion protected construction: Non-explosion protection
CE marking: EMC/RoHS
Power source: 24 VDC±10 %
Dimensions: Approx. 70 (W) x 120 (H) x 145 (D) mm
Weight: Approx. 0.9kg
Operating temperature range: 0°C to 40°C (no sudden changes)
Operating humidity range: 30 to 80 %RH (no condensation)
Target gases: COS, DEMS, DMDMOS, HMDS, HMDSO, NF3, OMCTS, QMS, SiO2, SO2, TEB, TEOP, TEOS, TMB, TMOP, TMP, TMS, TRIMOS, TRIMS